Offcut-related step-flow and growth rate enhancement during (100) β-Ga2O3 homoepitaxy by metal-exchange catalyzed molecular beam epitaxy (MEXCAT-MBE)

Mazzolini, Piero (Corresponding author); Falkenstein, Andreas; Galazka, Zbigniew; Martin, Manfred; Bierwagen, Oliver (Corresponding author)

Melville, NY : American Inst. of Physics (2020)
Journal Article

In: Applied physics letters
Volume: 117
Issue: 22
Page(s)/Article-Nr.: 222105

Identifier