Erosion behavior of Y2O3 in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation

Kindelmann, Moritz (Corresponding author); Stamminger, Mark; Schön, Nino Philippe; Rasinski, Marcin; Eichel, Rüdiger-A.; Hausen, Florian; Bram, Martin; Guillon, Olivier

Westerville, Ohio : American Ceramic Society (2020, 2021)
Journal Article

In: Journal of the American Ceramic Society
Volume: 104
Issue: 3
Page(s)/Article-Nr.: 1465-1474

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